Cyberoptics

 

http://www.CyberopticsSemi.com

 

Levelling/ALS2V - Teaching/ATS - Gapping/AGS and Vibration/AVS Sensors for wireless measurements - Wafer Mapper

AGS 200

AGS 200

Auto Gapping System in 200mm for wireless measuring on AMAT Producer, Novellus Vector tools

 

  Details  Download PDF

 

AGS 300

AGS 300

Gapping System in 300mm for wireless measuring on AMAT Producer, Novellus Vector tools

 

  Details  Download PDF

 

ALS2V200 and ALS2V300

ALS2V200 and ALS2V300

Auto Levelling System in 200mm and 300mm

 

 

  Details  Download PDF

 

 

 

ATS200 and ATS300

ATS200 and ATS300

Auto Teaching System for wireless measuring on AMAT P5000, Endura/Centura, TEL Track tools

 

  Details  Download PDF

 

AVS200 and AVS300

AVS200 and AVS300
Auto Teaching System for 200mm and 300mm Application

 

 

  Details  Download PDF

 

EX-Q

EX-Q

Wafer Mapping Sensor

 

 

 

  Details  Download PDF

 

 

 

EX-QS

EX-QS
Wafer Mapping Sensor

 

  Details  Download PDF